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V. N. Varakin, Yu. Ya. Kuzyakov

Application of pyroelectric detector to study the carbon nitride film synthesis by pulsed laser deposition method

Abstract

For the first time, a fast pyroelectric detector was used to study processes of film synthesis by pulsed laser deposition (PLD) method. The measurements were carried under actual conditions of carbon nitride film production. The dynamics of species deposition and induced by them substrate heating has been studied. In the double-pulse mode of PLD, an efficient delivery precursor molecules from gas-phase onto the substrate and a new channel of CN molecule synthesis have been shown to be realized.
Moscow University Chemistry Bulletin.
2011, Vol. 52, No. 1, P. 67
   

Copyright (C) Chemistry Dept., Moscow State University, 2002
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