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Shatokhin A. N., Demidiv A. V., Putilin F. N., Rumyantseva M. N., Gasíkov A. M.

Study of palladium and platinum plasmas used for polycrystalline film doping by laser ablation


Evaporation of Pd and Pt targets under the action of pulse Kr-F laser was studied. Special attention was paid to plasma formation at various energy-flux densities of laser radiation. Thresholds for Pd and Pt plasma formation were determined. Experiments on plasma probing were performed which made it possible to construct 3D spectra of ion charge distributions as functions of kinetic energy and time. The model for laser ablation accounting for different energy characteristics of Pd and Pt ions in plasma was proposed.
Moscow University Chemistry Bulletin.
2001, Vol. 42, No. 3, P. 167

Copyright (C) Chemistry Dept., Moscow State University, 2002
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