Shatokhin A. N., Demidiv A. V., Putilin F. N., Rumyantseva M. N., Gasíkov A. M.
Study of palladium
and platinum plasmas used for polycrystalline film doping by laser ablation
of Pd and Pt targets under the action of pulse Kr-F laser was studied. Special
attention was paid to plasma formation at various energy-flux densities of
laser radiation. Thresholds for Pd and Pt plasma formation were determined.
Experiments on plasma probing were performed which made it possible to
construct 3D spectra of ion charge distributions as functions of kinetic energy
and time. The model for laser ablation accounting for different energy
characteristics of Pd and Pt ions in plasma was proposed.
Copyright (C) Chemistry Dept., Moscow State University, 2002